Semiconductor device and manufacturing method

ABSTRACT

A semiconductor device includes a drift zone of a first conductivity type formed within a semiconductor body, wherein one side of opposing sides of the drift zone adjoins a first zone within the semiconductor body and the other side adjoins a second zone within the semiconductor body. First semiconductor subzones of a second conductivity type different from the first conductivity type are formed within each of the first and second zones opposing each other along a lateral direction extending parallel to a surface of the semiconductor body. A second semiconductor subzone is formed within each of the first and second zones and between the first semiconductor subzones along the lateral direction. An average concentration of dopants within the second semiconductor subzone along 10% to 90% of an extension of the second semiconductor subzone along a vertical direction perpendicular to the surface is smaller than the average concentration of dopants along a corresponding section of extension within the drift zone.

BACKGROUND

Semiconductor compensation devices such as n-or p-channel Metal Oxide Semiconductor Field Effect Transistors (n-or p-channel MOSFETs), diodes, Silicon-Controlled Rectifiers (SCRs), Gate Turn-Off thyristors (GTO thyristors) are frequently used for applications requiring low on-resistance R_(DS(on)). These devices are based on mutual compensation of the charge of n-and p-doped regions in a semiconductor body of the device. The n-and p-doped regions are spatially arranged such that, in a reverse operation mode, a space charge of the n-doped region compensates the space charge of the p-doped region. By using this compensation of the p-and n-doping, a concentration of dopants of the one of these regions constituting a drift zone can be increased, whereby, despite a possible loss in the current-carrying area, a gain in R_(DS(on)) is achieved. Production tolerances such as lithographic mismatch or deviations of target dopant concentrations may lead to deviations of desired compensation of these n-and p-doped regions. This may have a negative impact on device performance such as decreased device breakdown voltage.

For these and other reasons there is a need for the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a further understanding of embodiments and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments and together with the description serve to explain principles of embodiments. Other embodiments and many of the intended advantages of embodiments will be readily appreciated as they become better understood by reference to the following detailed description. The elements of the drawings are not necessarily to scale relative to each other. Like reference numerals designate corresponding similar parts. The features of the various illustrated embodiments can be combined in any way unless they exclude each other.

FIG. 1A illustrates one embodiment of a semiconductor compensation device including a cross-sectional view of a portion of a lateral channel FET including first and second semiconductor subzones.

FIG. 1B illustrates one example of a concentration profile of dopants along a line A-A′ of the semiconductor compensation device illustrated in FIG. 1A including intrinsic second semiconductor subzones.

FIG. 1C illustrates one example of a concentration profile of dopants along a line A-A′ of the semiconductor compensation device illustrated in FIG. 1A including first and second semiconductor subzones of a same conductivity type.

FIG. 1D illustrates one example of a concentration profile of dopants along a line A-A′ of the semiconductor compensation device illustrated in FIG. 1A including first and second semiconductor subzones of different conductivity type.

FIG. 2A illustrates a further embodiment of a semiconductor compensation device including a cross-sectional view of a portion of a vertical channel FET including first and second semiconductor subzones of different conductivity type.

FIG. 2B illustrates another embodiment of a semiconductor compensation device including a cross-sectional view of a portion of a lateral channel FET including first to third semiconductor subzones.

FIG. 3 is a simplified flowchart illustrating a method for manufacturing a semiconductor compensation device according one embodiment.

FIG. 4 is a simplified flowchart illustrating a method for manufacturing a semiconductor compensation device according to one embodiment.

FIG. 5A is a schematic cross-sectional view of a semiconductor body portion for illustrating a method of manufacturing a semiconductor compensation device in accordance with one embodiment.

FIG. 5B illustrates one embodiment of a schematic cross-sectional view of the semiconductor body portion of FIG. 5A after formation of first and second trenches.

FIG. 5C illustrates one embodiment of a schematic cross-sectional view of the semiconductor body portion of FIG. 5B after formation of an epitaxial semiconductor layer.

FIG. 5D illustrates one embodiment of a schematic cross-sectional view of the semiconductor body portion of FIG. 5C in a state during electrochemical alkaline wet etching of the epitaxial semiconductor layer.

FIG. 5E illustrates one embodiment of a schematic cross-sectional view of the semiconductor body portion of FIG. 5D at the end of electrochemical alkaline wet etching of the epitaxial semiconductor layer.

FIG. 5F illustrates one embodiment of a schematic cross-sectional view of the semiconductor body portion of FIG. 5E after electrochemical alkaline wet etching of the semiconductor epitaxial layer and after anisotropic etching of the epitaxial semiconductor layer.

FIG. 5G illustrates one embodiment of a schematic cross-sectional view of the semiconductor body portion of FIG. 5F after filling the first and second trenches with a semiconductor material.

DETAILED DESCRIPTION

In the following Detailed Description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology, such as “top,” “bottom,” “front,” “back,” “leading,” “trailing,” etc., is used with reference to the orientation of the Figure(s) being described. Because components of embodiments can be positioned in a number of different orientations, the directional terminology is used for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

FIG. 1A illustrates one embodiment of a lateral channel semiconductor compensation device 100 including drift zones 102 a . . . 102 c of a first conductivity type within a semiconductor body 104. From a front surface 106 of the semiconductor body 104, zones 108 a, 108 b extend into a depth of the semiconductor body 104 along a vertical direction. The drift zones 102 a . . . 102 c and the zones 108 a, 108 b are sequentially arranged along a lateral direction 110 extending in parallel to the front surface 106 of the semiconductor body 104.

In the compensation device 100 illustrated in FIG. 1, the sequence of arrangement of these elements along the lateral direction 110 is drift zone 102 a, zone 108 a, drift zone 102 b, zone 108 b, drift zone 102 c. One side 112 a of opposing sides 112 a, 112 b of the drift zone 102 b adjoins a side 114 a of zone 108 a and the other side 112 b of the opposing sides 112 a, 112 b of the drift zone 102 b adjoins a side 114 b of the zone 108 b within the semiconductor body 104. First semiconductor subzones 116 a . . . 116 d of a second conductivity type different from the first conductivity type are arranged at opposing sides 114 a, 115 a and 114 b, 115 b within the zones 108 a, 108 b, respectively. The first semiconductor subzones 116 a, 116 b adjoin the drift zones 102 a, 102 b and the first semiconductor subzones 116 c, 116 d adjoin the drift zones 102 b, 102 c, respectively.

Second semiconductor subzones 118 a, 118 b are arranged within the zones 108 a, 108 b. The second semiconductor subzone 118 a adjoins the first semiconductor subzones 116 a, 116 b, and the second semiconductor subzone 118 b adjoins the first semiconductor subzones 116 c, 116 d, respectively. In one embodiment, each of the first and second semiconductor subzones 116 a . . . 116 d, 118 a, 118 b has a columnar shape, i.e., a dimension of each of the subzones being larger in the vertical direction 120 than in the lateral direction 110. A bottom side 140 of each of the first semiconductor subzones 116 a . . . 116 d and each of the second semiconductor subzones 118 a, 118 b adjoins a portion of the semiconductor body 104 having the first conductivity type.

Semiconductor device 100 furthermore includes body regions 120 a, 120 b of the second conductivity type. The body regions 120 a, 120 b are arranged at a top side 142 of the first and second semiconductor subzones 116 a . . . 116 d, 118 a, 118 b. Source regions 122 a, 122 b of the first conductivity type are arranged at the front surface 106 within the semiconductor body 104. The source regions 122 a, 122 b and the body regions 120 a, 120 b are electrically coupled to a conductive structure 124. Gate structures 126 a . . . 126 c including gate electrodes 128 a . . . 128 c, gate dielectrics 130 a . . . 130 c and insulation structures 132 a . . . 132 c are arranged on the front surface 106 of the semiconductor body 104. The gate structures 126 a . . . 126 c are configured to control the conductivity of lateral channel regions formed within that portion of body regions 120 a, 120 b that is located between the source regions 122 a, 122 b and the drift zones 102 a . . . 102 c at the front surface 106. A drain region 134 of the first conductivity type is arranged at a back surface 136 of semiconductor body 104 opposite to the front surface 106.

The top side 142 of each of the first semiconductor subzones 116 a . . . 116 d and each of the second semiconductor subzones 118 a, 118 b adjoins a bottom side of the body regions 120 a, 120 b. An average concentration of dopants within the second semiconductor subzones 118 a, 118 b along 10% to 90% of an extension d of the second semiconductor subzones 118 a, 118 b along the vertical direction 120 is smaller than the average concentration of dopants along a corresponding section of extension within the drift zones 102 a . . . 102 c. This section of extension along 10% to 90% of d is schematically illustrated as d′.

In the semiconductor compensation device 100, charge compensation of the drift zones 102 a . . . 102 c, the second semiconductor subzones 118 a, 118 b and the first semiconductor subzones 116 a . . . 116 d may be precisely achieved by adjusting a thickness of the first semiconductor subzones 116 a . . . 116 d in an electrochemical alkaline wet etching process. A dimension 1 ₁ of each of the drift zones 102 a . . . 102 c along the lateral dimension 110 may be larger than the lateral dimension 1 ₂ of each of the second semiconductor subzones 118 a, 118 b. It is to be noted that FIG. 1A refers to an illustration of a portion of semiconductor compensation device 100. The structure illustrated with regard to FIG. 1 may extend into other portions of semiconductor device 100 and semiconductor device 100 may include a plurality of transistor cells as the ones illustrated in FIG. 1. Semiconductor device 100 may include further elements not illustrated in FIG. 1, either because they are located within a device portion different than the portion illustrated in FIG. 1 or because these elements are not illustrated for reasons of clarity. Examples for these elements not illustrated in FIG. 1 include edge termination structures and measures for increasing avalanche robustness by shaping a dopant profile within the drift zones, by shaping a taper of the first and second zones, or by shaping a dopant concentration profile within the first and second zones.

The first conductivity type may be an N-type and the second conductivity type may be a P-type.

The semiconductor body 104 may include an epitaxial layer on a substrate such as an epitaxial Si layer on a Si substrate. As an example, an N⁺-type silicon substrate may constitute the drain region 134 and an N-type epitaxial silicon layer formed on the N⁺-type substrate may constitute the drift zones 102 a . . . 102 c. An additional epitaxial layer including an average dopant concentration larger than the drift zones 102 a . . . 102 c and smaller than the substrate may be arranged between the substrate and the drift zones 102 a . . . 102 c, for example.

The first semiconductor subzones 116 a . . . 116 d may include epitaxial layers formed on sides of the zones 108 a, 108 b. The second semiconductor subzone 118 a may include an epitaxial layer formed between first semiconductor subzones 116 a, 116 b. The second semiconductor subzone 118 b may include an epitaxial layer formed between first semiconductor subzones 116 c, 116 d.

The conductive structure 124 may include conductive plugs and conductive layers connected to the conductive plugs. Examples for conductive materials for these elements include metals and doped semiconductors.

FIG. 1B illustrates one example of a concentration profile of dopants along a line A-A′ of the semiconductor compensation device illustrated in FIG. 1A. In the lower half of the graph, the dopants are of the first conductivity type and in the upper half of the graph the dopants are of the second conductivity type different from the first conductivity type.

The drift zone 102 b includes dopants of the first conductivity type different from the dopants of the second conductivity type formed within the first semiconductor subzones 116 c, 116 d. A concentration profile of dopants of the second conductivity type includes a maximum within each of the first semiconductor subzones 116 c, 116 d along the lateral direction A-A′. The concentration of dopants of the second conductivity type at the maximum may be in a range between 10¹⁵ cm⁻³ to 5×10¹⁶ cm⁻³.

A charge carrier concentration within the second semiconductor subzone 118 b is intrinsic, i.e., the second semiconductor subzone is undoped, having a value of concentration of dopants smaller than 10¹⁴ cm⁻³ in case of silicon as the material of the second semiconductor subzone 118 b.

FIG. 1C illustrates another example of a concentration profile of dopants along the line A-A′ of the semiconductor compensation device illustrated in FIG. 1A. In the lower half of the graph, the dopants are of the first conductivity type and in the upper half of the graph the dopants are of the second conductivity type different from the first conductivity type.

The drift zone 102 b includes dopants of the first conductivity type different from the dopants of the second conductivity type formed within the first semiconductor subzones 116 c, 116 d. A concentration profile of dopants of the second conductivity type includes a maximum within each of the first semiconductor subzones 116 c, 116 d along the lateral direction A-A′. The concentration of dopants of the second conductivity type at the maximum may be in a range between 10¹⁵ cm⁻³ to 5×10¹⁶ cm⁻³.

The second semiconductor subzone 118 b is of the second conductivity type and the concentration profile of dopants of the second conductivity type includes at least one minimum within the second semiconductor subzone 118 b along the lateral direction A-A′. The dopant species constituting the first and second semiconductor subzones 116 c, 116 d, 118 b may be equal or they may differ from each other.

FIG. 1D illustrates another example of a concentration profile of dopants along the line A-A′ of the semiconductor compensation device illustrated in FIG. 1A. In the lower half of the graph, the dopants are of the first conductivity type and in the upper half of the graph the dopants are of the second conductivity type different from the first conductivity type.

The drift zone 102 b includes dopants of the first conductivity type different from the dopants of the second conductivity type formed within the first semiconductor subzones 116 d, 116 d. A concentration profile of dopants of the second conductivity type includes a maximum within each of the first semiconductor subzones 116 c, 116 d along the lateral direction A-A′. The concentration of dopants of the second conductivity type at the maximum may be in a range between 10¹⁵ cm⁻³ to 5×10¹⁶ cm⁻³.

The second semiconductor subzone 118 b is of the first conductivity type and a maximum concentration of dopants within the second semiconductor subzone 118 b is smaller than the maximum concentration of dopants within the drift zone 102 b.

The profiles of dopant concentration illustrated in each of the upper and lower halfs of FIGS. 1B to 1D may be defined by one or several dopant species of the same conductivity type, i.e., the first conductivity type in the lower half and the second conductivity type in the upper half of the graph.

FIG. 2A illustrates a cross-sectional view of one embodiment of a vertical channel semiconductor compensation device 200. Similar to semiconductor compensation device 100 illustrated in FIG. 1, semiconductor compensation device 200 includes drift zones 202 a . . . 202 c, zones 208 a, 208 b, body regions 220 a . . . 220 d, source regions 222 a . . . 222 c, conductive structure 224 and drain region 234.

In contrast to the semiconductor compensation device 100 illustrated in FIG. 1, the second semiconductor subzones 218 a, 218 b constitute further drift zones of device 200 since gate structures 226 a . . . 226 d including gate electrodes 228 a . . . 228 d, gate dielectrics 230 a . . . 230 d, insulating structures 232 a . . . 232 d are arranged such that current paths between source and drain extend through both the drift zones 202 a . . . 202 c and the second conductive subzones 218 a, 218 b constituting the further drift zones. In one embodiment, one of the gate structures such as gate structure 226 b is arranged on a top side and in contact with one of the second semiconductor subzones such as the second semiconductor subzone 218 a and one of the gate structures such as gate structure 226 a is arranged on a top side and in contact with one of the drift zones such as drift zone 202 a. A relation between the average concentration of dopants within the second semiconductor subzones 218 a, 218 b and the drift zones 202 a . . . 202 c may be as described with regard to the example illustrated in FIG. 1A. A lateral dimension 1 ₁ of each of the drift zones 202 a . . . 202 c may be equal to the lateral dimension 1 ₂ of the second semiconductor subzone. According to other embodiments, 1₁ may be different from 1₂, e.g., 1₁>1₂.

FIG. 2B illustrates a cross-sectional view of one embodiment of a lateral channel semiconductor compensation device 250. Similar to semiconductor compensation device 100 illustrated in FIG. 1, semiconductor compensation device 250 includes drift zones 252 a, 252 b, zone 258 a, body regions 270 a . . . 270 c, source regions 272 a . . . 272 c, conductive structure 274, drain region 284, gate structures 276 a . . . 276 e including gate electrodes 278 a . . . 278 e, gate dielectrics 280 a . . . 280 e, insulating structures 282 a . . . 282 e.

In contrast to the semiconductor compensation device 100 illustrated in FIG. 1, zone 258 a furthermore includes third semiconductor subzones 286 a, 286 b of opposite conductivity type than the first semiconductor subzones 266 a . . . 266 d. From each side of opposing two sides 264 a, 264 b within zone 258 a, the first and third semiconductor subzones 266 a . . . 266 d, 286 a, 286 b are alternately along the lateral direction 260. The second semiconductor subzone 268 a is formed between first semiconductor subzones 266 b, 266 c. The third semiconductor subzones 286 a, 286 b constitute further drift zones of device 250.

A relation between the average concentration of dopants within the second semiconductor subzone 268 a and the drift zones 252 a, 252 b may be as described with regard to the example illustrated in FIG. 1A.

FIG. 3 is a simplified flowchart of one embodiment of a method for manufacturing a semiconductor compensation device. At S100, a drift zone of a first conductivity type is formed within a semiconductor body, wherein one side of opposing sides of the drift zone adjoins a first zone within the semiconductor body and the other side adjoins a second zone within the semiconductor body.

At S110, first semiconductor subzones of a second conductivity type different from the first conductivity type are formed within each of the first and second zones opposing each other along a lateral direction extending parallel to a surface of the semiconductor body.

At S120, a second semiconductor subzone is formed within each of the first and second zones arranged between the first semiconductor subzones along the lateral direction.

At S130, dopants are formed within the second semiconductor subzone and within the drift zone, wherein an average concentration of dopants within the second semiconductor subzone along 10% to 90% of an extension of the second semiconductor subzone along a vertical direction perpendicular to the surface is set smaller than the average concentration of dopants along a corresponding section of extension within the drift zone.

Method features included in any one of S100 to S130 listed above may be carried out together with, prior of after any other one of S100 to S130. For example, forming dopants within the drift zone at S130 may be carried out together with S100.

FIG. 4 illustrates a simplified flowchart of another embodiment of a method for manufacturing a semiconductor compensation device. Apart from feature S200 corresponding to feature S100 of the method illustrated in FIG. 3, at S210, in the method illustrated in FIG. 4, from each side of opposing two sides within each of the first and second zones, a number of n (n≧1) first subzones of a second conductivity type different from the first conductivity type and a number of n-1 third subzones of the first conductivity type are formed and alternately arranged within the respective zone along a lateral direction extending parallel to a surface of the semiconductor body.

At S220, a second semiconductor subzone is formed between the number of n first subzones and n-1 third subzones on one side and the number of n first subzones and n-1 third subzones on the other side.

At S230, dopants are formed within the second semiconductor subzone and within the drift zone, wherein an average concentration of dopants within the second semiconductor subzone along 10% to 90% of an extension of the second semiconductor subzone along a vertical direction perpendicular to the surface is set smaller than the average concentration of dopants along a corresponding section of extension within the drift zone.

The number n may be equal to, for example, one, two, three or four or even more than four.

Apart from method features illustrated in FIG. 3 or 4, further device elements may be formed together with any one of the illustrated method features, prior to or after any one of these features or between any two of these features. As an example, these methods may also include formation of elements such as a source region, a drain region, a gate structure, a conductive structure electrically coupled to semiconductor elements formed within an active area of the semiconductor body.

According to one embodiment, formation of the first semiconductor subzones includes formation of first and second trenches into the semiconductor body, forming an epitaxial layer on a surface of the semiconductor body, at sidewalls and at a bottom side of the first and second trenches and etching the epitaxial layer by electrochemical alkaline wet etching so as to adjust a thickness of the epitaxial layer. By electrochemical alkaline wet etching the dimension of the first semiconductor subzones may be adjusted so as to achieve precise compensation of the drift zones and the first and second semiconductor subzones. As an electrochemical alkaline solution suited for etching first semiconductor subzones formed of silicon, potassium hydroxide (KOH) or tetramethyl ammonium hydroxide (TMAH) may be used, for example.

When etching the epitaxial layer, a reverse voltage may be applied between the semiconductor body and the expitaxial layer. The reverse voltage may be chosen such that a space charge region extends into an overall volume of the drift zone so that free charge carriers are depleted from this zone. Since the process of etching the first semiconductor subzones by an electrochemical alkaline solution is terminated when full depletion of free charge carriers in the first semiconductor subzones is reached, e.g., a space charge region spreads over an overall volume of the first semiconductor subzones, a thickness of the first semiconductor subzones has to be originally chosen such that a neutral semiconductor volume within the first semiconductor subzones remains also during application of the reverse blocking voltage so that free charge carriers are available for the start of the electrochemical alkaline etch process.

The epitaxial layer may be removed from the surface of the semiconductor body and from a bottom side within each of the first and second trenches by etching so as to leave the epitaxial layer at the sidewalls of the first and second trenches, respectively. This etching may be carried out by anisotropic dry etching, for example.

Gate structures may be arranged in contact with the second semiconductor subzones. Thereby, a further drift zone defined by the second semiconductor subzones may be achieved and this semiconductor volume may contribute to a current path between source and drain.

FIGS. 5A to 5G illustrate schematic cross-sectional views of a semiconductor body portion 404 at different process stages during manufacture of a semiconductor compensation device.

Referring to FIG. 5A, a semiconductor body 404 including an N⁺-type substrate 440 and an N-type epitaxial layer 442 formed thereon is provided as a base material.

A thickness d of the epitaxial layer 442 may be chosen in accordance with a target thickness of that volume which absorbs a reverse voltage in an operation mode of the finalized device. A dopant concentration within the epitaxial layer 442 may correspond to the target dopant concentration of N-type columns constituting drift zones of the finalized semiconductor compensation device. The concentration of dopants within the semiconductor layer 442 may be subject to production tolerances. These production tolerances may be due to limited accuracy when setting a dopant concentration during epitaxy, for example.

Referring to the schematic cross-sectional view of FIG. 5B, first and second trenches 408 a, 408 b are formed within the epitaxial layer 442 extending from a front surface 406 along a vertical direction 420 into a depth of semiconductor body 404. The trenches 408 a, 408 b may be etched into the semiconductor body 404 using an etch mask such as a hard mask 444 on the surface 406 of the semiconductor body 404. A bottom side of the trenches 408 a, 408 b may be arranged within the semiconductor layer 442. A mesa region between the trenches 408 a, 408 b may define drift zones 402.

Referring to the schematic cross-sectional view of the semiconductor body portion 404 illustrated in FIG. 5C, an epitaxial layer 415 of p-type conductivity is formed on the front surface 406 of the semiconductor body 404 and at sidewalls and a bottom side of each of the first and second trenches 408 a, 408 b.

Referring to the schematic cross-sectional view of the semiconductor body portion 404 illustrated in FIG. 5D, the epitaxial semiconductor layer 415 undergoes electrochemical alkaline wet etching using an electrochemical alkaline solution 446. For example, when etching silicon, the electrochemical alkaline solution may include KOH or TMAH. A voltage V₁ is applied between the epitaxial semiconductor layer 415 and the electrochemical alkaline solution 446. A junction between the electrochemical alkaline solution 446 and the epitaxial semiconductor layer 415 is similar to a Schottky barrier junction. Therefore, a Schottky depletion region 448 builds up at this interface. The voltage V₁ may be chosen such that the Schottky diode formed by the junction between the epitaxial semiconductor layer 415 and the electrochemical alkaline solution 446 is shorted or forward-biased.

A voltage V₂ is applied between the p-type epitaxial semiconductor layer 415 and the n-type semiconductor body 404 such that the pn junction between these regions is reverse-biased and a space charge region including a first depletion layer 450 within the semiconductor body and a second depletion layer 452 within the epitaxial semiconductor layer 415 is formed. A value of V₂ may be chosen such that a volume of the semiconductor body 404 between the first and second trenches 408 a, 408 b, i.e., drift zone 402, becomes depleted of free charge carriers. A thickness of the epitaxial semiconductor layer 415 may be chosen such that the depletion regions 448, 452 do not meet after application of the voltages V₁, V₂. In other words, the voltages V₁ and V₂ may be chosen such that a neutral volume 454 not constituting a space charge region remains.

Referring to the schematic cross-sectional view of the semiconductor body portion 404 illustrated in FIG. 5E, etching of the epitaxial semiconductor layer 415 is terminated once the depletion regions 452 and 448 meet. The volume of the epitaxial semiconductor layer 415 includes two parts, namely the volume of Schottky depletion layer 448 and pn depletion layer 452. Depletion layer 452 causes a precise compensation of the other pn depletion layer 450 formed within the semiconductor body 404. It is to be noted that this charge compensation is not affected by any production tolerances during manufacture of device elements. The charges of Schottky depletion layer 448 constitute excess charges with regard to an ideal charge compensation since the Schottky barrier does not remain after removal of the electrochemical alkaline solution. These excess charges may be counterbalanced or removed in later process stages. As an example, charges of Schottky depletion layer 448 may be removed by isotropic dry or wet etching of a respective portion of epitaxial semiconductor layer 415. As a further example, charges of Schottky depletion layer 448 may also be removed by thermal oxidation of a respective portion of epitaxial semiconductor layer 415 and subsequent removal of the oxide layer by an etch process, for example. As yet another example, charges of Schottky depletion layer 448 may be counterbalanced by filling the trenches 408 a, 408 b with an epitaxial semiconductor material having a conductivity type different from the conductivity type of the epitaxial semiconductor layer 415. Removal of excess charges by above processes may be carried out after removal of the electrochemical alkaline solution 446 and before filling the trenches 408 a, 408 b with a semiconductor material as described in a later process stage illustrated in FIG. 5G.

Referring to the schematic cross-sectional view of the semiconductor body portion 404 illustrated in FIG. 5F, the epitaxial semiconductor layer 415 is etched to remove those parts of this layer which are located at a bottom side within each of the trenches 408 a, 408 b and on the front surface 406 of the semiconductor body 404. As an example, anisotropic dry etching may be used to etch the semiconductor layer 415. After etching, the remaining parts of this layer define first semiconductor subzones 416 a . . . 416 d within the first and second trenches 408 a, 408 b.

Referring to the schematic cross-sectional view of the semiconductor body portion 404 illustrated in FIG. 5G, the first and second trenches 408 a, 408 b are filled with a semiconductor material defining a second semiconductor subzone. A concentration of dopants within this second semiconductor structure may be chosen to counterbalance the excess charge carriers of the Schottky depletion layer 448 illustrated in FIGS. 5D, 5E. Thereby, a precise charge compensation with regard to semiconductor layer 442, first semiconductor subzones 416 a . . . 416 d and second semiconductor subzones 418 a, 418 b may be achieved. The second semiconductor subzones 418 a, 418 b may also be formed as intrinsic semiconductor subzones, e.g., in case of preceding removal of the excess charge carriers of the Schottky depletion layer 448 by etching as described above.

Further processes may follow or be carried out before, between or together with the processes illustrated in FIGS. 5A to 5G to complete the semiconductor compensation device.

It is to be understood that the features of the various embodiments described herein may be combined with each other unless specifically noted otherwise.

Although specific embodiments have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that a variety of alternate and/or equivalent implementations may be substituted for the specific embodiments shown and described without departing from the scope of the present invention. This application is intended to cover any adaptions or variations of the specific embodiments discussed herein. Therefore, it is intended that this invention be limited only by the claims and the equivalents thereof. 

What is claimed is:
 1. A semiconductor device, comprising: a drift zone of a first conductivity type formed within a semiconductor body, wherein one side of opposing sides of the drift zone adjoins a first zone within the semiconductor body and the other side adjoins a second zone within the semiconductor body; first semiconductor subzones of a second conductivity type different from the first conductivity type, the first semiconductor subzones being formed within each of the first and second zones opposing each other along a lateral direction extending parallel to a surface of the semiconductor body; a second semiconductor subzone within each of the first and second zones formed between the first semiconductor subzones along the lateral direction; and wherein an average concentration of dopants within the second semiconductor subzone along 10% to 90% of an extension of the second semiconductor subzone along a vertical direction perpendicular to the surface is smaller than the average concentration of dopants along a corresponding section of extension within the drift zone.
 2. The semiconductor device of claim 1, wherein a concentration profile of dopants of the second conductivity type within each one of the first semiconductor subzones includes at least one maximum along the lateral direction.
 3. The semiconductor device of claim 2, wherein the second semiconductor subzone is of the second conductivity type and the concentration profile of dopants of the second conductivity type within the second semiconductor subzone includes at least one minimum along the lateral direction.
 4. The semiconductor device of claim 2, wherein the concentration of dopants of the second conductivity type at the at least one maximum is in a range between 10¹⁵cm⁻³ to 5×10¹⁶cm⁻³.
 5. The semiconductor device of claim 1, wherein the second semiconductor subzone is of the first conductivity type.
 6. The semiconductor device of claim 5, wherein the second semiconductor subzone constitutes a further drift zone.
 7. The semiconductor device of claim 1, wherein the first semiconductor subzone includes an epitaxial semiconductor layer adjoining the drift zone.
 8. The semiconductor device of claim 1, wherein a lateral dimension of the drift zone between the first and second zones is larger than the lateral dimension of the second semiconductor subzone.
 9. The semiconductor device of claim 1, wherein a bottom side of each of the first and second semiconductor subzones adjoins a top side of a third semiconductor zone of the first conductivity type.
 10. The semiconductor device of claim 9, wherein a bottom side of the third semiconductor zone adjoins to a top side of a fourth semiconductor zone of the first conductivity type, an average concentration of dopants being higher in the fourth semiconductor zone than in the drift zone by at least a factor of
 10. 11. A method for manufacturing a semiconductor device, comprising: forming a drift zone of a first conductivity type formed within a semiconductor body, wherein one side of opposing sides of the drift zone adjoins a first zone within the semiconductor body and the other side adjoins a second zone within the semiconductor body; first semiconductor subzones of a second conductivity type different from the first conductivity type, the first semiconductor subzones being formed within each of the first and second zones opposing each other along a lateral direction extending parallel to a surface of the semiconductor body; forming a second semiconductor subzone within each of the first and second zones arranged between the first semiconductor subzones along the lateral direction; and further comprising forming dopants within the second semiconductor subzone and within the drift zone, wherein an average concentration of dopants within the second semiconductor subzone along 10% to 90% of an extension of the second semiconductor subzone along a vertical direction perpendicular to the surface is set smaller than the average concentration of dopants along a corresponding section of extension within the drift zone.
 12. The method of claim 11, wherein forming the first semiconductor subzones includes forming first and second trenches into the semiconductor body; forming an epitaxial layer on a surface of the semiconductor body, at sidewalls and at a bottom side of each of the first and second trenches; etching the epitaxial layer by electrochemical alkaline wet etching; and removing the epitaxial layer from the surface of the semiconductor body and from a bottom side within each of the first and second trenches by etching so as to leave the epitaxial layer at the sidewalls of the first and second trenches, respectively.
 13. The method of claim 12, wherein etching the epitaxial layer includes applying a reverse voltage between the semiconductor body and the expitaxial layer.
 14. The method of claim 11, further comprising forming a source region at a first surface of the semiconductor body and forming a drain region at a second surface of the semiconductor body opposite to the first surface; and forming gate structures including a gate dielectric and a gate electrode, wherein at least one of the gate structures is arranged in contact with the drift zone.
 15. The method of claim 14, wherein at least another one of the gate structures is arranged to be in contact with the second semiconductor subzone constituting a further drift zone.
 16. The method of claim 14, wherein a lateral dimension of the drift zone between the opposing sidewalls is set larger than the lateral dimension of the second semiconductor subzone.
 17. The method of claim 11, further comprising forming a body region of the second conductivity type, wherein a bottom side of the body region is arranged in contact with a top side of the second semiconductor subzone. 